Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator

Published in Journal of Physics: Conference Series, 2022

Recommended citation: Y. Guan. S.Masui, S. Kadoya, M. Michihata and S. Takahashi, "Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator." J. Phys. Conf. Ser. 2368 [1]. 12014 (2022).