Publications

Super-resolution Imaging of Sub-diffraction-limited Pattern with Superlens based on Deep Learning

Published in International Symposium on Measurement Technology and Intelligent Instrument (ISMTII 2023), 2023

The 11th Global Conference on Materials Science and Engineering.

Recommended citation: Y. Guan. S.Masui, S. Kadoya, M. Michihata and S. Takahashi, "Super-resolution Imaging of Sub-diffraction-limited Pattern with Superlens based on Deep Learning." ISMTII 2023, A084, Sep. 2022, Seoul, Korea.

Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis

Published in Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022), 2022

The 11th Global Conference on Materials Science and Engineering.

Recommended citation: Y. Guan. S.Masui, S. Kadoya, M. Michihata and S. Takahashi, "Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis." ASPEN2022, OR-15-0084, Nov. 2022, Singapore.

Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator

Published in Journal of Physics: Conference Series, 2022

The 11th Global Conference on Materials Science and Engineering.

Recommended citation: Y. Guan. S.Masui, S. Kadoya, M. Michihata and S. Takahashi, "Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator." J. Phys. Conf. Ser. 2368 [1]. 12014 (2022).

Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator

Published in The 11th Global Conference on Materials Science and Engineering (CMSE 2022), 2022

The 11th Global Conference on Materials Science and Engineering.

Recommended citation: Yizhao, Guan. et,al., "Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator." CMSE 2022 (CMSE4736). 3.

自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究(第 11 報) ―空間光位相変調による液相プローブ高感度検出―

Published in JSPE conference, 2022

Japanese Society of Precision engineering.

Recommended citation: Yizhao, Guan. et,al., "自律的欠陥探索・分裂型マルチプローブによるナノ異物検出に関する研究(第 11 報) ―空間光位相変調による液相プローブ高感度検出―." JSPE conference 2022. 3.

The FDTD Analysis of Near-field Response for Microgroove Structure with Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy

Published in Manufacturing Science and Engineering Conference, selected to Journal of Manufacturing Science and Engineering, 2021

The American Society of Mechanical Engineers. [Download paper here]

Recommended citation: Yizhao, Guan. et,al., "The FDTD Analysis of Near-field Response for Microgroove Structure with Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy." J. Manuf. Sci. Eng. Mar 2022, 144(3): 031004