The FDTD Analysis for Dark Field In-process Depth Measurements of Fine Microgrooves

Published in IMEKO XXIII World congress, and selected to the Measurement: Sensors, 2021

Recommended citation: Yizhao, Guan. et,al., "The FDTD Analysis for Dark Field In-process Depth Measurements of Fine Microgrooves." Measurement: Sensors, Volume 18, December 2021, 100257