Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator

Published in The 11th Global Conference on Materials Science and Engineering (CMSE 2022), 2022

Recommended citation: Yizhao, Guan. et,al., "Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator." CMSE 2022 (CMSE4736). 3.