Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis

Published in Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022), 2022

Recommended citation: Y. Guan. S.Masui, S. Kadoya, M. Michihata and S. Takahashi, "Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis." ASPEN2022, OR-15-0084, Nov. 2022, Singapore.